Apparatus and methods for verifying the location of areas of interest within a sample in an imaging system

摘要

An apparatus and method for verifying the location of an area of interest within a sample are disclosed. An imaging system includes an optical system and a stage movable relative to the optical system. A computer server is in communication with the imaging system and with a review station. The imaging system is capable of spatially locating a datum mark on the sample and determining a spatial offset value of the mark relative to a nominal position thereof. The coordinate systems of a respective one of the imaging system and the review station can be standardized. The method includes locating a datum mark on the sample, and identifying an area of interest within the sample. The method further includes determining the location of the area of interest relative to the mark. The method further includes locating again the datum, and checking that a dimensional error in locating the datum mark is less than a tolerance value to verify location of the area of interest.