X-RAY FOREIGN MATTER DETECTION METHOD AND X-RAY FOREIGN MATTER DETECTION SYSTEM

摘要

PROBLEM TO BE SOLVED: To individually materialize foreign matter detection at high sensitivity concerning a plurality of kinds of objects to be inspected in a package.

SOLUTION: An X-ray foreign matter detection method comprises an X-ray exposure process for exposing an X-ray on the package P divided into a plurality of storing regions A-D and the plurality of the kinds of the objects to be inspected Wa-Wd stored to each storing region A-D respectively; a process for outputting X-ray intensity data corresponding to a transmission dose of the X-ray transmitting the package P and each object to be inspected Wa-Wd; a process for generating X-ray images Ip and Iwa-Iwd of the package P and each object to be inspected Wa-Wd; a process for designating the regions in each X-ray image IA-ID and Iwa-Iwd; a process for setting a foreign matter detection threshold value T in each X-ray image IA-ID (Iwa-Iwd) designating the regions; and a process for carrying out foreign matter determination on the basis of the X-ray image and the foreign matter detection threshold value in each storing region.

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