| 摘要 |
PROBLEM TO BE SOLVED: To provide a linear motor apparatus which can improve cooling performance of a coil without deterioration of thrust and to provide a stage apparatus and an aligner in which temperature rise can be controlled and performance of apparatus can be improved by providing the linear motor apparatus. SOLUTION: The linear motor apparatus 10 comprises a stator 11 and a rotor 12 to allow relative movement between the stator 11 and rotor 12. Any one of the stator 11 and rotor 12 is provided with a plurality of coil trains 14a, 14b arranged with the coils 13a, etc. and the coil 13b, etc. along the direction (y direction) of relative movement, and cooling pipes 15a, 15b as the accommodation members for individually accommodating a plurality of coil trains 14a, 14b. COPYRIGHT: (C)2004,JPO |
