| 摘要 |
PROBLEM TO BE SOLVED: To provide a die ejector apparatus having an overrun preventing mechanism which can prevent surely by a simple mechanism a pepper-pot from moving erroneously to the outside of a chip distributing area present on a wafer sheet. SOLUTION: In the die ejector apparatus, a thrusting-up unit 1 having a pepper-pot 3 moves in an X-direction along an X-table 11, and moves in a Y-direction along a Y-table 12. The sliders of the ends of rods 21, 22 stuck on an axis portion 20 slide respectively along a linear guide 17 present under the X-table 11. Dogs 25, 26 are provided respectively in the ends of the rods 21, 22, and a sensing portion 8 for the dogs 25, 26 is provided in the thrusting-up unit 1. When the sensing portion 8 senses the dogs 25, 26, the thrusting-up unit 1 so stops its movements in the X- and Y-directions as to prevent the pepper-pot 3 from overrunning to the outside of the chip distributing area present on the wafer sheet. COPYRIGHT: (C)2004,JPO |
