| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck having extremely improved high breakdown voltage characteristics by improving the impregnation properties of a hole sealing treatment agent in a structure where an electrode layer formed inside has an opening. SOLUTION: The electrostatic chuck comprises a base 1, a lower insulating layer 2 formed on the upper surface of the base 1 by flame spraying, an electrode layer 3 formed on the lower insulating layer 2, and an upper insulating layer 4 formed on the lower insulating layer 2 by flame spraying so that the electrode layer 3 is covered, where the opening ratio of the electrode layer 3 ranges from 5 to 80%. COPYRIGHT: (C)2004,JPO |
