| 摘要 |
PROBLEM TO BE SOLVED: To relax thermal stress by keeping a strength against external force such as a vibration or an impact of frame multi-point fixed type. SOLUTION: This device completely fixes a part of a length measuring direction to objects (20, 21). and elastically fixes the other part of the length measuring direction to the objects using a bushing 32 provided with an elastic layer 34 between a frame body 10 (30, 31). COPYRIGHT: (C)2004,JPO
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