SYSTEM AND METHOD FOR MEASURING PROFILE

摘要

PROBLEM TO BE SOLVED: To provide a measuring profile system and a measuring profile method for minimizing such an effect of hysterisis phenomenon as enlarging any measurement error generated depending on measuring directions. SOLUTION: The measuring profile system is provided with a slide section 11 containing a stylus 12 on one end and a mirror face 13 on the other end; a guide section 15 movably-supporting the slide section 11 in its shaft core direction via both an air bearing 31 and an elastic material 14; a locating means 32 using a reflected light from the mirror face 13 to measure the position of the slide section 11; a relative position measuring means 27 measuring relative positions of both the slide section 11 and the guide section 15; a calculating means 33 computing a tilt angle and a measuring direction of a measuring plane 2a when the stylus 12 scans the measuring plane 2a; and position control means 28, 29 justifying the guide section 15 in order to control relative positions of both the slide section 11 and the guide section 15 depending on the result from the above calculating means 33. COPYRIGHT: (C)2004,JPO