Mechanical deformation amount sensor

摘要

A mechanical deformation amount sensor includes a sensor structure (1) which is formed by a semiconductor substrate or an insulating substrate and integrally includes a deformation portion (2) deformable, when a physical quantity to be detected is applied to the sensor structure (1), due to the physical quantity and a support portion (1a) for supporting the deformation portion (2), a carbon nanotube resistance element (61, 62) which is provided on the deformation portion (2) so as to be mechanically deformed in response to deformation of the deformation portion (2) and a wiring pattern (7) which is formed in a pattern on the sensor structure (1) so as to be connected to the carbon nanotube resistance element (61, 62). By applying a voltage to the carbon nanotube resistance element (61, 62) via the wiring pattern (7), a change of electrical conductivity of the carbon nanotube resistance element (61, 62) upon mechanical deformation of the carbon nanotube resistance element (61, 62) is fetched as an electrical signal.