Substrate treatment system, substrate transfer system, and substrate transfer method

摘要

A substrate transfer system comprising a cassette table (20, 414) for mounting a cassette (CR, C) which has an opening portion (43) for loading and unloading a substrate (W) and a cover (44) detachably provided to the opening portion (43), process portion (11, 402) for processing the substrate housed in a cassette on the cassette table (20, 414), a transfer arm mechanism (21, 411) for taking out the substrate (W) from the cassette table (20, 414), transferring it to process units G1 to G5, and returning a processed substrate to the cassette (CR, C) on the cassette table (20, 414), partition members (32, 60, and 49) provided between the transfer arm mechanism (21, 411) and the cassette table (20, 414), for separating an atmosphere on the side of the transfer arm mechanism (21) from that on the side of the cassette table (20), a passage (33, 33a) formed in the partition member (60) so as to face the opening portion (43) of the cassette on the cassette table (20, 414), for passing the substrate taken out from the cassette on the cassette table by the transfer arm mechanism (21) and returning the substrate to the cassette (CR, C) on the cassette table (20, 414), cassette moving mechanisms (80 and 82) for moving the opening portion (43) of the cassette on the cassette table closer to the passage (33, 33a) or to be farther from the passage (33, 33a), and a cover removing mechanism (47, 247) for detaching the cover (44) from the opening portion (43) or attaching the cover (44) to the opening portion (43) of the cassette (CR, C).