THIN FILM FORMING APPARATUS CLEANING METHOD,申请号KR20037015945-传众专利搜索

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发明名称	THIN FILM FORMING APPARATUS CLEANING METHOD
摘要
申请公布号	KR20040008212(A)	申请公布日期	2004.01.28
申请号	KR20037015945	申请日期	2003.12.05
申请人		发明人
分类号	H01L21/20;C23C16/44;H01L21/302;H01L21/3065;H01L21/31	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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