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发明名称
Substrate processing method and apparatus
摘要
申请公布号
EP1093157(A3)
申请公布日期
2004.01.28
申请号
EP20000122439
申请日期
2000.10.13
申请人
EBARA CORPORATION
发明人
SHINOZAKI, HIROYUKI
分类号
H01L21/302;B05C11/06;B05D1/00;H01L21/00;H01L21/027;H01L21/311;H01L21/312;(IPC1-7):H01L21/00
主分类号
H01L21/302
代理机构
代理人
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地址
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