Radiation-sensitive resin composition,申请号EP19980118693-传众专利搜索

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发明名称	Radiation-sensitive resin composition
摘要
申请公布号	EP0907108(B1)	申请公布日期	2004.01.28
申请号	EP19980118693	申请日期	1998.10.02
申请人	JSR CORPORATION	发明人	INOUE, MASAAKI;INOMATA, KATSUMI;HARA, HIROMICHI;YUMOTO, YOSHIJI
分类号	G03F7/022;G03F7/004;(IPC1-7):G03F7/004	主分类号	G03F7/022
代理机构		代理人
主权项
地址

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