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发明名称
FABRICATION OF SILICON MICRO MECHANICAL STRUCTURES
摘要
申请公布号
EP1383707(A2)
申请公布日期
2004.01.28
申请号
EP20020715619
申请日期
2002.01.11
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
DESPONT, MICHEL;DRECHSLER, UTE;MAGNUSON, ROY, H.
分类号
B81C1/00;B81B3/00;C23F13/14;H01L21/306;(IPC1-7):B81B3/00
主分类号
B81C1/00
代理机构
代理人
主权项
地址
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