| 摘要 |
A method for manufacturing piezoelectric components involves using a plurality of divided hard masks to form a highly accurate electrode pattern without degradation of electrical characteristics while increasing mask strength. The method is for forming vibration electrodes, terminal electrodes, and lead electrodes for connecting the vibration and terminal electrodes on a piezoelectric substrate and includes the step of preparing a first hard mask having openings corresponding to the vibration electrode and lead electrodes and a second hard mask having openings corresponding to the terminal and lead electrodes. The first and second hard masks are arranged such that the openings of the first and second hard masks are partially overlapped, and the overlapped portion is located at a position that is spaced from the vibration electrode by at least about three times the thickness of the piezoelectric substrate.
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