发明名称 |
Fabrication facility cycle time approximation method employing historic work in process (WIP) cycle time correlation |
摘要 |
Within a method for approximating a cycle time for fabricating a microelectronic fabrication within a microelectronic fabrication facility there is first determined from historic data for fabrication of the microelectronic fabrication within the microelectronic fabrication facility a constant which correlates previous microelectronic fabrication loadings and cycle times within the microelectronic fabrication facility. The correlating constant may then be employed for approximating a cycle time for a future work in process (WIP) quantity of the microelectronic fabrication within the microelectronic fabrication facility.
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申请公布号 |
US6684118(B2) |
申请公布日期 |
2004.01.27 |
申请号 |
US20020047328 |
申请日期 |
2002.01.14 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD |
发明人 |
WU KAN;HUNG WEI-JAI;TU SHU-CHUAN |
分类号 |
G05B13/02;(IPC1-7):G06F19/00;G06F17/60 |
主分类号 |
G05B13/02 |
代理机构 |
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