发明名称 Fabrication facility cycle time approximation method employing historic work in process (WIP) cycle time correlation
摘要 Within a method for approximating a cycle time for fabricating a microelectronic fabrication within a microelectronic fabrication facility there is first determined from historic data for fabrication of the microelectronic fabrication within the microelectronic fabrication facility a constant which correlates previous microelectronic fabrication loadings and cycle times within the microelectronic fabrication facility. The correlating constant may then be employed for approximating a cycle time for a future work in process (WIP) quantity of the microelectronic fabrication within the microelectronic fabrication facility.
申请公布号 US6684118(B2) 申请公布日期 2004.01.27
申请号 US20020047328 申请日期 2002.01.14
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD 发明人 WU KAN;HUNG WEI-JAI;TU SHU-CHUAN
分类号 G05B13/02;(IPC1-7):G06F19/00;G06F17/60 主分类号 G05B13/02
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