| 发明名称 |
Fabrication method for integrated microactuator coils |
| 摘要 |
A method for fabricating an integrated coil-on-keeper assembly for use in a magnetic circuit to actuate a microactuator. The assembly is formed on a keeper substrate by patterning an insulator layer, plating at least one coil layer and patterning another insulator layer on top of each coil layer. The keeper substrate is etched to form the top keeper of the coil-on-keeper assembly.
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| 申请公布号 |
US6683758(B2) |
申请公布日期 |
2004.01.27 |
| 申请号 |
US20010866942 |
申请日期 |
2001.05.29 |
| 申请人 |
SEAGATE TECHNOLOGY LLC |
发明人 |
HIPWELL, JR. ROGER L.;BONIN WAYNE A.;WALTER LEE;WISSMAN BARRY D.;BOUTAGHOU ZINE-EDDINE;IHLOW-MAHRER BARBARA J.;CRANE PETER;DUFRENE BRIAN |
| 分类号 |
G11B5/55;(IPC1-7):G11B5/56 |
主分类号 |
G11B5/55 |
| 代理机构 |
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