发明名称 |
CAPACITIVE CERAMIC RELATIVE-PRESSURE SENSOR |
摘要 |
This relative-pressure sensors has virtually no zero offset at relative humidities up to near the saturation limit. The sensor has a diaphragm (11) having a surface on which a electrode (13) is deposited and a substrate (12) having a bore (23) for guiding reference air from of first surface to an opposite surface. The first surface is polished and provided with at least an addional electrode (15). The substrate and the diaphragm are soldered or brazed together along the periphery by means of a spacer (20) to form a chamber which is covered from inside with a thin layer (24) of hydrophobic material that is introduced through the bore after the soldering or brazing.
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申请公布号 |
CA2311569(C) |
申请公布日期 |
2004.01.27 |
申请号 |
CA20002311569 |
申请日期 |
2000.06.14 |
申请人 |
ENVEC MESS- UND REGELTECHNIK GMBH + CO. |
发明人 |
HEGNER, FRANK |
分类号 |
G01L9/12;G01L9/00;G01L13/06;G01L19/06;(IPC1-7):G01L9/12;G01L21/00 |
主分类号 |
G01L9/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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