发明名称 In-situ stripe height calibration of magneto resistive sensors
摘要 An in-situ (result-directed/predictive) MR stripe height calibration method capable of operating on the fly during lapping operation. The method involves utilization of an interval sampling technique, which provides a high number of data points. The data provided are filtered and averaged at each kerf location to provide a much higher calibration accuracy than previously available. The primary advantage is to create an accurate relationship between MR element resistance and its stripe height while the MR element is being lapped. The method thus provides the ability to target either resistance or stripe height or a combination of both during the lapping process. Finally, the system is completely self-contained and does not required wafer data.
申请公布号 US6684171(B2) 申请公布日期 2004.01.27
申请号 US20020127198 申请日期 2002.04.22
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 CHURCH MARK A.;DESOUCHES ALAIN MICHEL LOUIS;KREBS RICHARD E.
分类号 G11B5/00;G11B5/10;G11B5/105;G11B5/31;G11B5/39;G11B5/455;(IPC1-7):G06F19/00;B24B49/00 主分类号 G11B5/00
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