| 摘要 |
In processing a substrate, adsorption members provided on a table play an important role in whether "indirectly influenced marks" are left on the rear surface of the substrate. Groups of adsorption members are selected in a predetermined order for use in the adsorption operation. Adsorption at a first group of members is terminated before an "indirectly influenced mark" is left on the substrate, and another adsorption operation is initiated at a second group of members. In this manner, the substrate is held on the table by migrating adsorption sites on the rear surface of the substrate.
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