Electrically insulating vacuum coupling

摘要

An electrically insulating vacuum coupling for use in an ion implanter for connecting any two parts of the vacuum chamber housing together while maintaining the electrical potentials of the two parts. The coupling comprises an inner sleeve of ceramic material (e.g. Al2O3) and an outer sleeve of a polymer/litharge mixture. The polymer may be a urethane polymer. Litharge is included in the material of the outer sleeve to absorb x-rays produced within the vacuum chamber. The coupling is particularly useful for coupling an ion source to the main housing of the vacuum chamber