METHOD AND APPARATUS FOR PERFORMING LOCALIZED THERMAL ANALYSIS AND SUB-SURFACE IMAGING BY SCANNING THERMAL MICROSCOPY

摘要

A platinum/rhodium resistance thermal probe is used as an active device which acts both as a highly localized heat source and as a detector to perform localized differential calorimetry, by thermally inducing and detecting events such as glass transitions, meltings, recystallizations and thermal decomposition within volumes of material estimated at a few .mu.m3. Furthermore, the probe is used to image variations in thermal conductivity and diffusivity, to perform depth profiling and sub-surface imaging. The maximum depth of the sample that is imaged is controlled by generating and detecting evanescent temperature waves in the sample.