发明名称 METHOD FOR FABRICATING IMAGE SENSOR
摘要 PURPOSE: A method for fabricating an image sensor is provided to enhance the yield and the productivity by restricting the generation of cracks of a micro lens protection layer and reducing a processing period of time and a manufacturing cost. CONSTITUTION: A base structure including a light receiving element and a metal line is formed on a semiconductor wafer including a net die region and an edge die region. A passivation layer(202) is formed on the base structure. A color filter array(204), an over-coating layer(206), and a micro lens(208) are formed on the net die region and the edge die region. A micro lens protection layer(209) is formed on the entire surface of the wafer without removing the micro lens(208), the over-coating layer(206), and the color filter array(204) from the edge die region.
申请公布号 KR20040006748(A) 申请公布日期 2004.01.24
申请号 KR20020041123 申请日期 2002.07.15
申请人 HYNIX SEMICONDUCTOR INC. 发明人 PARK, JAE YEONG
分类号 H01L27/146;(IPC1-7):H01L27/146 主分类号 H01L27/146
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