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发明名称
PLASMA PROCESSING APPARATUS
摘要
申请公布号
AU2003252470(A1)
申请公布日期
2004.01.23
申请号
AU20030252470
申请日期
2003.07.03
申请人
TOKYO ELECTRON LIMITED
发明人
TSUTOMU HIGASHIURA
分类号
H05H1/46;B01J3/00;B01J3/03;B01J19/08;C23C16/50;H01J37/32;H01L21/205;(IPC1-7):H01L21/31;H01L21/302
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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