| 摘要 |
PROBLEM TO BE SOLVED: To accurately detect the location and size of even a fine defect without the need for developing processing in a relatively short time. SOLUTION: After a fluorescent liquid 1 is applied to the surface of an object to be inspected P, and the fluorescent liquid 1 adhering to the surface of the object to be inspected P is removed, the surface of the object to be inspected P is irradiated with ultraviolet rays 2 from a direction which intersect the surface at approximately right angles via a light transmitting means 9. Fluorescence 4 from the fluorescent liquid 1 which has permeated in a defect H in the surface of the object to be inspected P is simultaneously received via the light transmitting means 9 to detect the defect H in the surface defect detecting method. After a specific wavelength absorption liquid for absorbing light having a specific wavelength is applied to the surface of the object to be inspected, and the specific wavelength absorption liquid adhering to the surface of the object to be inspected is removed, the surface of the object to be inspected is irradiated with light containing the light having the specific wavelength. Reflected light after the irradiation is received to detect the defect on the surface of the object to be inspected. COPYRIGHT: (C)2004,JPO
|
