| 摘要 |
PROBLEM TO BE SOLVED: To supply an organic material being set to be a vapor-phase state onto the entire surface of a substrate whose position is fixed. SOLUTION: The organic material 12 is vaporized or sublimated in a vaporization sublimation chamber 5 to generate a feed gas. A carrier gas is mixed into the feed gas and is transported to a film formation chamber 4 by a feed gas transportation pipe 6. A direction control plate 2 is provided at an injector 18 in the feed gas transportation pipe 6. The direction control plate 2 changes the flow of the feed gas toward the substrate 3 along the surface of the substrate 3, and forms a film by supplying the feed gas to the entire surface of the substrate 3, thus making uniform a film thickness distribution within the substrate 3 and forming an improved organic film. COPYRIGHT: (C)2004,JPO
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