| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide the acceleration and reduction of power consumption of a thermooptic quartz system optical switch. <P>SOLUTION: A SiO<SB>2</SB>film is formed on a silicon substrate 100, optical waveguides consisting of clad layers 103, 104 and cores 105, 106 are formed, Cr thin film heaters 107, 108 are formed on the optical waveguides, and a diaphragm structure 102 is formed by reducing the thickness of a base in the region of the Cr thin film heater pattern. Moreover, a copper thin film 117 is formed on the rear face of the diaphragm part 102 to prevent warping. Through holes are formed at the end of the Cr thin film heater with the optical waveguides interposed therebetween. The improvement of response speed and the reduction of power consumption are attained by the above reduction of the heating part and heat insulating structure. <P>COPYRIGHT: (C)2004,JPO</p> |
