HOLDING DEVICE FOR OPTICAL COMPONENT IN PROJECTION OPTICAL SYSTEM, OPTICAL ADJUSTMENT METHOD USING THE HOLDING DEVICE, EXPOSURE DEVICE HAVING THE HOLDING DEVICE, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a holding device for an optical component in a simple and small projection optical system by which astigmatism is surely corrected without causing coma aberration at correcting the astigmatism, and to provide an optical adjustment method using the holding device, an exposure device having the holding device, an exposure method, and a device manufacturing method. SOLUTION: The holding device for the optical component in a projection optical system holds at least two optical components and has a relative angle adjusting means to incline either of two optical components to an optical axis and an inclining quantity adjusting means to integrally incline at least two optical components to the optical axis by the same quantity in a direction reverse to an inclining direction by the relative angle adjusting means separately from the relative angle adjusting means. COPYRIGHT: (C)2004,JPO