摘要 |
A process for production of high-purity hexafluoroethane, wherein a mixed gas containing hexafluoroethane and chlorotrifluoromethane is reacted with hydrogen fluoride in a gas phase in the presence of a fluorination catalyst at 200-450° C., for fluorination of the chlorotrifluoromethane, or wherein pentafluoroethane containing chlorine compounds with 1-3 carbon atoms is reacted with hydrogen in a gas phase in the presence of a hydrogenation catalyst at 150-400° C., and the product is then reacted with fluorine in a gas phase in the presence of a diluent gas.
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