| 摘要 |
An apparatus (22, 122) for filtering a substance (13) includes an electrically insulating substrate (30, 130) that separates a source volume (12) containing the substance (13) from a target volume (18). The substrate (30, 130) has a first side in fluid communication with the source volume (12) and a second side in fluid communication with the target volume (18). The substrate (30, 130) further includes a plurality of openings (42, 142) connecting the first side with the second side. The openings (42, 142) are sized to provide filtering fluid communication between the source volume (12) and the target volume (18) for at least one phase of the substance. A heater film (32) is deposited over selected portions of the substrate (30, 130). The heater film (32) contacts the substrate (30, 130) to heat at least a portion of the openings (42, 142).
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