APPARATUS FOR FORMING THIN FILM, AND METHODS FOR MANUFACTURING THIN FILM AND THIN FILM-DEPOSITED SHEET

摘要

PROBLEM TO BE SOLVED: To provide an apparatus and a method for stably forming a thin film having an excellent adhesiveness and film quality. SOLUTION: The apparatus is equipped with at least one each of material-supplying means having a material retention device, substrate retention device, plasma-generating means and means for controlling electric potential of plasma generated by the plasma-generating means in a decompressible vessel. The apparatus is further equipped with a means for measuring electric potential difference between the plasma and the surface of the material retention device. COPYRIGHT: (C)2004,JPO