HEATING DEVICE HAVING ELECTROSTATIC ATTRACTION FUNCTION

摘要

PROBLEM TO BE SOLVED: To provide a heating device having an electrostatic attraction function, which is superior in thermal shock resistance, free from the trouble of peeling, has a moderate resistance, and an enough electrostatic attraction in a medium to high temperature range of 500 to 800°C; is protected against the leakage current damage; and is capable of operating stably even if a temperature rises sharply.

SOLUTION: The heating device having an electrostatic attraction function comprises, at least, a support base 2, an electrostatic attraction electrode 4 and a heating layer 5 both formed on the support base 2, and an insulator layer 6 formed on the electrostatic attraction electrode 4 and the heating layer 5. The electrostatic attraction electrode 4 and/or the heating layer 5 is formed of pyrolytic graphite containing 0.001 to 30 wt.% boron and/or boron carbide in terms of boron concentration, and the heating device having an electrostatic function is characterized by the fact that the insulator layer 6 is formed of a material having electric resistivity of 106to 1015Ωcm.

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