| 摘要 |
PROBLEM TO BE SOLVED: To obtain a surface form measuring method wherein a surface form in which recovery error is reduced can be measured for all parts of an object to be measured. SOLUTION: This is a surface form measuring method in which distance sensors 11-15 for measuring distance to a surface of an object 16 to be measured are arranged, and calculation is performed based on the distance traversed in which relative movement is performed between the object 16 and the distance to the surface of the object 16. A calculation circuit 18 is provided with a process of calculating difference values based on the distances which are measured simultaneously in the distance sensors 11-15, a process of adding a previously set value as a dummy difference value for regions wherein the difference values cannot be calculated, a process of converting to a frequency region is performed regarding the difference values of all regions, and a process of calculating components constituting difference values for every frequency by correcting using a scale factor which is defined for every frequency, and a value calculated by inverse transformation is made as the value representing the surface form at the traversed distance. COPYRIGHT: (C)2004,JPO
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