| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing apparatus and method in which a product stuck on a structure in a reaction furnace is easily taken out by treating the inside wall or the like of the furnace with a release material prepared by treating high purity silicon carbide powder, high purity silicon nitride powder, high purity silica or the like with a binder, in the apparatus for manufacturing high purity silicon by a vapor phase zinc reducing method. SOLUTION: When high purity silicon is used for the structure in the reaction furnace and high purity silicon stuck on the structure is taken out as it is, the release material is applied on the inside wall of the furnace, so that a quality of the product is improved, the operation is simplified, the production time is shortened and the production cost is reduced . COPYRIGHT: (C)2004,JPO
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