| 摘要 |
PROBLEM TO BE SOLVED: To provide a storage method and a storage device enabling realization of a clean condition of a mold in the case of delivery when storing the mold for resin molding. SOLUTION: The storage device for the mold 3 is provided with a sensor 5 evaluating a condition of a mold face 4 optically, a lamp unit 12 having an excimer lamp 14 and irradiating the mold face 4 by irradiation condition based on the results of evaluation, a nozzle 17 injecting nitrogen gas to the vicinity of the mold face 4, a storage part 21 storing the mold 3 after irradiation, and a nozzle 24 injecting nitrogen gas into the storage part 21. Consequently, the mold 3 which is irradiated and cleaned by excimer ultraviolet rays 13 by the irradiation condition based on the results of evaluation by the sensor 5 is stored in the storage part 21 in nitrogen atmosphere, is delivered as required, and is mounted on a resin molding device. Since the mold 3 is stored in a clean condition in the storage part 21 in the nitrogen atmosphere, the mold 3 can be used immediately after delivery. COPYRIGHT: (C)2004,JPO
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