发明名称 A METHOD OF INCREASING THE AREA OF A USEFUL LAYER OF MATERIAL TRANSFERRED ONTO A SUPPORT
摘要 <p>The invention relates to a method of increasing the area of a useful layer (63) of material coming from a source substrate (6) and which is effectively transferred onto a support substrate (7). The invention is remarkable in that the dimensions of the outer outline (C61, C71) of one of said source and support substrates (6 and 7), referred to as the "first" substrate (6, 7) are greater than the dimensions of the outer outline (C71, C61) of the other substrate referred to as the "second" substrate (7, 6), in that the outer outline (C6, C7) of the flat central zone (60, 70) of said first substrate (6, 7) presents dimensions greater than the dimensions of the inner outline (C7, C6) of the secondary chamfer (75, 65) of said second substrate (7, 6), and in that during bonding, the substrates (6, 7) are applied one against the other in such a manner that the inner outline (C7, C6) of the secondary chamfer (75, 65) of the second substrate (7, 6) is inscribed within the outline (C6, C7) of the flat central zone (60, 70) of the first substrate (6, 7). The invention is applicable to fabricating a composite substrate in the field of electronics, optics, or optoelectronics.</p>
申请公布号 WO2004008527(A1) 申请公布日期 2004.01.22
申请号 WO2003EP07855 申请日期 2003.07.16
申请人 S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES;MALEVILLE, CHRISTOPHE 发明人 MALEVILLE, CHRISTOPHE
分类号 H01L27/12;H01L21/02;H01L21/762;H01L33/00;(IPC1-7):H01L21/762;H01L21/20 主分类号 H01L27/12
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