| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical waveguide whose quality is high by suppressing the occurrences of cracks and air bubbles and also reducing the variation of refractive indexes and its manufacturing method. SOLUTION: The optical waveguide is provided with a core 30 whose periphery is surrounded with a clad 20 formed on a base plate 10, and trialkylsilil system compound is used as an organic source respectively forming the clad 20 and the core 30 consisting of a silica glass system material. COPYRIGHT: (C)2004,JPO |
