摘要 |
PROBLEM TO BE SOLVED: To provide a solid state imaging device in which the I/O relation of a signal is linear and fixed pattern noise is reduced. SOLUTION: A charge transfer circuit 10 comprises a transfer transistor 5a, an inverted amplifier 5b, an inverted line amplifier 12a, a negative feedback capacitor Cf, and a capacitor reset switch 12b. The inverted line amplifier 12a is set with a large open loop gain Go, and the capacitance of the negative feedback capacitor Cf is set sufficiently lower than the equivalent capacitance Cv of a photodiode 1a. The negative feedback capacitor Cf is formed by inserting an insulating film between polysilicon electrodes. Operation input voltage of the inverted line amplifier 12a is set higher than that of the inverted amplifier 5b. COPYRIGHT: (C)2004,JPO
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