| 摘要 |
PROBLEM TO BE SOLVED: To provide an inlet port mechanism of a workpiece for speedily and smoothly replacing the inert gas, without permitting an atmosphere in a storage container body to adversely affect the workpiece stored inside. SOLUTION: In the introduction port mechanism of the workpiece, the storage container body 2 storing a plurality of workpieces W is placed, and the workpieces in the storage container are taken into a workpiece transport area 46 made into the inert gas atmosphere via an opening gate 62, by removing an opening/closing lid 12 of the storage container body. The mechanism is provided with a mounting stand, the opening/closing door opening/closing the opening gate, a lid opening/closing mechanism 70 for opening/closing the opening/closing lid of the storage container, a gas-jetting means 84 jetting inert gas and low dew-point dry air and an interference member 106, which once applies inert gas and low dew-point dry air, which are jetted from the gas-jetting means, reduces flow speed and makes the opened storage container body flow. COPYRIGHT: (C)2004,JPO |
