| 摘要 |
PROBLEM TO BE SOLVED: To improve foot print and maintenance property in a heat-treatment apparatus for TFT and improve throughput. SOLUTION: This heat-treatment apparatus is roughly divided into three sections, namely, a cassette station 10, a loader/unloader part 12, and a group 14 of heat treatment units. In the group 14 of the heat treatment units, the heat treatment units 22 extending linearly in X direction are arranged in parallel at many steps in layout of two steps x two rows. Each heat treatment unit 22 connects three modules, namely, a process module (P/M) 24, a transfer module (T/M) 26, and a load lock module (LL/M) 28 in a row in X direction across gate mechanisms 30, 32. A base conveyance device coming in and out of the modules (P/M) 24 and (LL/M) 28 adjacent on both sides of the transfer module (T/M) 26 is provided in the transfer module (T/M) 26. COPYRIGHT: (C)2004,JPO |
