| 摘要 |
PROBLEM TO BE SOLVED: To provide a light source adjusting device capable of quantitatively adjusting a light source. SOLUTION: The light source adjusting device has a Koehler illumination system having a collector lens 4 projecting the picture of the light source 2 to the position of the pupil 10a of an objective 10, and the lens 4 is moved in an optical axis direction by a focusing part 3. A CCD camera 12 photographs with light from a sample 11 irradiated with the light from the light source 2 through the lens 4, and light intensity is fetched from the taken picture data so as to arithmetically calculate the irregularity of light quantity in an arithmetic part 13. Then, the obtained result is displayed on a display part 14. COPYRIGHT: (C)2004,JPO
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