摘要 |
PROBLEM TO BE SOLVED: To realize a small optical displacement sensor of simple constitution, and to provide an optical measuring instrument capable of inspecting easily and precisely an inner face of a cylindrical member of a small inside diameter or the like, and an optical element suitable therefor. SOLUTION: This optical sensor 1 has a light source 2, the first optical element 3 formed integrally with a curved face 3a for converging light from the light source and a reflecting face 3b for changing an advancing direction of the light, the second optical element 4 formed integrally with a curved face 4a for converging the light passing through the first optical element 3 to be reflected by a measuring face, and a reflecting face 4b for changing an advancing direction of the light, and a position detecting element 5 for detecting the light passed through the second optical element 4. An optical path is constituted of the first optical element 3 and the second optical element 4 to realize the optical sensor of the small size. COPYRIGHT: (C)2004,JPO
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