| 发明名称 |
Remote monitoring system for chemical liquid delivery |
| 摘要 |
A system and method for remote monitoring one or more liquid chemical delivery systems and/or tools associated with the fabrication and/or manufacturing of electronic/semiconductor components. Such a system and method allows the operator to quickly and accurately verify the status of each delivery system and tool with respect to liquid condition, alarms, problem situations, and other indications from one convenient location.
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| 申请公布号 |
US2004015331(A1) |
申请公布日期 |
2004.01.22 |
| 申请号 |
US20030410628 |
申请日期 |
2003.04.10 |
| 申请人 |
ARCH SPECIALITY CHEMICALS, INC. |
发明人 |
BLATT CHRIS;NAYFAH MUSTAFA;WOLFE DAN;VAN CLEEMPUT MARC;TEFF DANIEL JOSEPH |
| 分类号 |
H01L21/02;C23C16/448;C23C16/52;G06F11/00;G06F15/00;H01L21/00;(IPC1-7):G06F11/00 |
主分类号 |
H01L21/02 |
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