| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a walking beam that can normally convey a cracked substrate even if a substrate cracks during conveyance in a heat-treating furnace. <P>SOLUTION: The walking beam is used to convey substantially square substrates in a heat-treating furnace for heat-treating a functional film material formed on the substrates. The walking beam has three or more of two types of beams of different movements, or two types of beams 2a to 2d and 3a to 3c in which one is fixed to the furnace and the other is movable, and each type of beam has support pins 4, 6 for supporting the substrate 1a with which they are in contact near the perimeter of the substrate 1a, and sub support pins 5, 7 shorter than the support pins 4 and 6 so as to be normally out of contact with the substrate 1a and to come into contact with the substrate 1a supportively if the substrate 1a cracks and the support pins 4 and 6 can not support the substrate 1a by themselves. <P>COPYRIGHT: (C)2004,JPO</p> |
