| 摘要 |
PROBLEM TO BE SOLVED: To perform a spin cleaning on substrates having mutually different sizes without generating water marks by using the same device. SOLUTION: A spin cleaner is provided with a treating chamber 4 in which spin cleaning is performed on the substrates W, a chuck 5 which horizontally holds the substrates W in the chamber 4, and a motor 6 which rotates the substrates W held by the chuck 5. The chuck 5 can hold substrates W having different sizes. The treating chamber 4 is composed of a treating chamber main body 8 and a jig 9 which can be attached to and detached from the main body 8. An opening 12 is formed in the jig 9 so as to introduce the outside air into the chamber 4. A plurality of tools 9 having mutually different opening diameters is prepared in advance and the air current in the chamber 4 is controlled by selectively using the tools 9 in accordance with the sizes of the substrates W. COPYRIGHT: (C)2004,JPO |
