COATING LIQUID FOR FORMING INSULATION FILM, AND SEMICONDUCTOR DEVICE BY USING THE SAME

摘要

PROBLEM TO BE SOLVED: To improve a signal transmission performance of a circuit by uniformizing the dielectric constant distribution of an insulation film. SOLUTION: This coating liquid for a film preferably used for a semiconductor device comprises silica obtained by hydrolyzing an alkoxysilane, and contains first fine particles having≤1,000Åmean particle diameter and≤20 % 3σof the particle diameter of the mean particle diameter of the first fine particles, and second fine particles having≤1/3 mean particle diameter of the first fine particles and≤20 % 3σof the particle diameter of the mean particle diameter of the second fine particles. COPYRIGHT: (C)2004,JPO