| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas bearing wherein an amount of gas outflow during the operation is stabilized and the impairing of reliability is prevented. SOLUTION: A gas throttling part 13A is provided with: a first opening hole 3a formed at a pressure chamber side, a second opening hole 3b formed at a cylinder side and having a diameter larger than the first opening hole 3a; and further a porous member 14a and a fixing member 15a. The porous member 14a is contained in the second opening hole 3b formed on a piston 3, and fixed by the fixing member 15a from an upper face side of the porous member 14a. The fixing member 15a has the circular shape as shown in Fig. 3, and has a small hole 16 on its central part. In a gas outflow passage, a gas stored in the pressure chamber inside of the piston 3, flows to the porous member 14a to restrict its flow rate as shown by an arrow, is further throttled by the small hole 16 formed on the fixing member 15a, and flows out to a sliding face between the piston 3 and the cylinder. COPYRIGHT: (C)2004,JPO
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