发明名称 |
Variable speed pump control |
摘要 |
A method and apparatus for monitoring operating characteristics and/or control signals of a system comprising a variable speed vacuum pump. Operating characteristics and/or control signals of the system may be monitored, and the pumping speed of the variable speed vacuum pump may be altered responsive to the monitored operating characteristics and/or control signals.
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申请公布号 |
US2004013531(A1) |
申请公布日期 |
2004.01.22 |
申请号 |
US20030400174 |
申请日期 |
2003.03.26 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
CURRY MARK WILLIAM;GREENBANK DANIEL PAUL;LU DANNY CAM TOAN |
分类号 |
F04D19/04;F04D27/02;(IPC1-7):F04B49/00 |
主分类号 |
F04D19/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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