发明名称 Variable speed pump control
摘要 A method and apparatus for monitoring operating characteristics and/or control signals of a system comprising a variable speed vacuum pump. Operating characteristics and/or control signals of the system may be monitored, and the pumping speed of the variable speed vacuum pump may be altered responsive to the monitored operating characteristics and/or control signals.
申请公布号 US2004013531(A1) 申请公布日期 2004.01.22
申请号 US20030400174 申请日期 2003.03.26
申请人 APPLIED MATERIALS, INC. 发明人 CURRY MARK WILLIAM;GREENBANK DANIEL PAUL;LU DANNY CAM TOAN
分类号 F04D19/04;F04D27/02;(IPC1-7):F04B49/00 主分类号 F04D19/04
代理机构 代理人
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