摘要 |
<P>PROBLEM TO BE SOLVED: To stabilize the force required for division, when a multilayer aggregate substrate is divided along a breaking groove like chocolate breaking. <P>SOLUTION: When a raw laminate 3 is manufactured by laminating a plurality of ceramic green sheets 2, a dummy layer 9 comprising a material whose rate of contraction in a sintering process is smaller than that of the ceramic green sheet 2 is so formed on a specified ceramic green sheet 2 as to straddle the breaking groove 6 in the raw laminate 3. The breaking groove 6 is formed to the depth where the dummy layer 9 can be split. The split dummy layers 9 are re-united in the sintering process by a difference in the rate of contraction between the ceramic green sheet 2 and the dummy layer 9. An end on a bottom side of the breaking groove 6 provided to the multi-layer aggregate substrate 1 is defined by the dummy layer 9. For this purpose, the depth of the breaking groove 6 is made constant. <P>COPYRIGHT: (C)2004,JPO |