发明名称 |
METHOD AND APPARATUS FOR MEASURING TERAHERTZ PULSE LIGHT |
摘要 |
PROBLEM TO BE SOLVED: To measure a time series waveform in the electric field strength of terahertz pulse light over the entire part of each site in the two-dimensional region of a target object. SOLUTION: An antenna 56 collectively irradiates the two-dimensional region of a sample 100 with the terahertz pulse light, and the two-dimensional region of an electrooptical crystal 61 collectively receives the transmission pulse light. The two-dimensional region of the crystal 61 is collectively irradiated with probe pulse light that is primarily chirped and synchronized with pulse light L55. An analyzer 65 extracts a specific polarization component in the probe pulse light where a polarization state is modulated by the pulse light L55 due to the passage of the crystal 61. Optical fiber flux 66 secondarily chirps the probe pulse light where only the specific polarization component is extracted for each corresponding to each site of the crystal 61 to expand each pulse width. A photoelectric conversion element array 67 photoelectrically converts the probe pulse light after chirping for each. COPYRIGHT: (C)2004,JPO |
申请公布号 |
JP2004020352(A) |
申请公布日期 |
2004.01.22 |
申请号 |
JP20020175037 |
申请日期 |
2002.06.14 |
申请人 |
TOCHIGI NIKON CORP;NIKON CORP |
发明人 |
IWAMOTO TOSHIYUKI |
分类号 |
G01J11/00;G01N21/27;G01N21/35;G01N21/3586;(IPC1-7):G01N21/35 |
主分类号 |
G01J11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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