发明名称 Apparatus for producing and sustaining a glow discharge plasma under atmospheric conditions
摘要 Method for generating an atmospheric pressure glow plasma (APG), wherein said plasma is generated in a discharge space between a plurality of electrodes. A dielectric is present on at least one of said electrodes, said dielectric having a boundary surface with said plasma enabling interactions between said plasma and said surface. Said dielectric is arranged for releasing electrons contributing to said plasma from said surface by said interactions.
申请公布号 US2004011764(A1) 申请公布日期 2004.01.22
申请号 US20020198740 申请日期 2002.07.19
申请人 DE VRIES HINDRIK WILLEM;MORI FUYUHIKO;ALDEA EUGEN;VAN DE SANDEN MAURITIUS CORNELIUS MARIA 发明人 DE VRIES HINDRIK WILLEM;MORI FUYUHIKO;ALDEA EUGEN;VAN DE SANDEN MAURITIUS CORNELIUS MARIA
分类号 B08B7/00;C08J7/00;H01L21/205;H05H1/24;(IPC1-7):C23F1/00;B44C1/22;C03C15/00;C03C25/68 主分类号 B08B7/00
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